- Three independently adjustable TrueFocus ion sources
- Planar sample sizes up to 50 mm diameter by 25 mm height
- Controllable beam diameter over a wide range of operating energies (100 eV to 10 keV)
- Liquid nitrogen-cooled sample stage (optional)
- Vacuum/inert gas/cryogenic transfer system protects environmentally sensitive samples (optional)
- Remote operation
Advanced sample preparation
The TrionMill’s three ion sources provide large-scale milling of planar and cross-section samples. High-energy operation allows rapid milling of large areas (up to 50 mm); low-energy operation allows gentle sample polishing.
Accepts large sample sizes
The TrionMill creates the largest and most uniform flat area achievable by ion milling. The instrument accepts the following sample sizes:
- Planar: Up to 50 mm diameter x 25 mm height [1.968 x 0.787 in.]
- Cross section: Maximum: 10 x 10 x 4 mm [0.39 x 0.39 x 0.157 in.]
Cross-section station (optional)
The Fischione Instruments’ Cross-section station is a tool for creating pristine cross-section samples ready for ion milling in the SEM Mill. Learn more about the Cross-section station.
Quick sample transfer
The front-loading load lock with pneumatic vacuum gate valve enables high sample throughput. The bayonet sample holder’s quick release functionality speeds sample transfer. The sample transfer rod folds out of the way when not in use.
Precise angle adjustment
The ion sources are tilted to provide the desired milling angle. The continuously adjustable ion source tilt angles range from 0 to +10°. You may choose to use one, two, or three of the TrueFocus ion sources. Each ion source beam angle moves in unison.
Automated milling angle adjustment
Automated milling angle adjustment using the touch screen enables you to create multi-step milling sequences that include the automatic adjustment of milling angles throughout the milling process.
Programmable sample motion
Sample rotation is 360° continuous rotation with variable rotation speed and a sample rocking feature. Automatic height detection establishes the milling plane, which yields repeatable results.
Integrated stage cooling (optional)
The TrionMill’s liquid nitrogen system features a dewar located within the enclosure that is fully integrated and interlocked. The dewar is positioned near the operator for easy access. Temperature is continuously displayed on the touch screen. The stage cooling functionality provides up to 18 hours of cryo conditions.
The TrionMill offers the ability to program and maintain a specific temperature between ambient and cryogenic.
At the conclusion of milling at cryogenic temperatures, the stage temperature is automatically increased to ambient before venting to avoid sample frost and contamination. A thermal safeguard can be programmed to a specific stage temperature threshold at which the ion sources will be deactivated if the liquid nitrogen in the dewar becomes depleted.
Vacuum/inert gas/cryogenic transfer system (optional)
This system allows for the direct transfer of a sample at vacuum, in inert gas, or at a cryogenic temperature to SEM or FIB. The system uses active pumping to maintain high vacuum during transfer. The transfer system is a collaboration with Quorum Technologies Ltd.
Sample viewing (optional)
The ion milling process can be monitored in situ in the milling position when using either of the optional high-magnification microscopes.
- High-magnification (525X) microscope
- High-magnification (1,960X) microscope
The viewing window is protected by a shutter, which prevents buildup of sputtered material that can interfere with sample observation.
Sample image acquisition (optional)
The sample image acquisition option employs a CMOS (complementary metal oxide semiconductor) camera and monitor to view samples and capture images in situ during milling. This system is useful for monitoring the delayering process.
The ion milling process can be automatically terminated by elapsed time or by temperature.
Fischione Instruments is committed to support maximum instrument uptime. To that end, the TrionMill has the capability of remote diagnostics. When connected to the Internet, the TrionMill can be accessed by Fischione Instruments Service for rapid troubleshooting and diagnostics support.