Model 1010 Ion Mill

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  • Precision ion milling and polishing system for TEM specimens
  • 0° to 45° milling angle range
  • LN2 specimen cooling to eliminate artifacts
  • Variable energy milling
  • Fully programmable, easy-to-use
  • Adjustable rocking angle for XTEM samples
  • Oil-free vacuum system


Consistently produces high-quality TEM specimens

The Model 1010 Ion Mill is a tabletop, PC-controlled precision milling and polishing system for creating high-quality TEM specimens with large electron transparent areas. It is fully programmable and easy to use. The Model 1010 incorporates two independently adjustable, variable energy hollow anode discharge (HAD) ion sources, liquid nitrogen specimen cooling, 0° to 45° milling angles, automatic gas control, and an oil-free vacuum system for ultra-clean specimen processing.

Thinning to electron transparency
Ion milling is used on physical science specimens to reduce their thickness to electron transparency. Inert gas, typically argon, is ionized and then accelerated toward the specimen surface. By means of momentum transfer, the impinging ions sputter material from the specimen at a controlled rate. Liquid nitrogen cooling of the specimen stage is highly effective in eliminating heat-induced artifacts.

Programmable, automatic operation
The fully programmable Model 1010 operates with minimal user intervention. When operated at the upper energy range, rapid milling occurs even at low milling angles. When operated at low voltage and current, material is gently removed from the specimen. In addition to full specimen rotation, the programmable rocking angle control is ideally suited for preparing cross-section (XTEM) specimens. The ion milling process can be automatically terminated by temperature, by elapsed time, or by a laser photodetection system.

Enhanced viewing
Specimens can be imaged during the milling process with either a stereo microscope or a high-magnification microscope and CCD camera. Viewing is enhanced by independently controlled transmitted and reflected illumination.


XTEM specimen showing a poly-
crystalline copper film on an epitaxial
Ti0.5W0.5N/TiN superlattice on MgO

Courtesy of I. Petrov, University of Illinois (U.S.A.)
TEM image of GaSb after ion milling
with liquid nitrogen specimen cooling
Sb doped Si
Courtesy of P.M. Voyles, D.A. Muller, J.L. Grazul, P.H. Citrin, H.-J.L. Gossmann, Lucent Technologies (U.S.A.)
XTEM YBCO superconductor specimen
Courtesy of G. Duscher and J. Luck, ORNL (U.S.A.)

Download product literature for the Model 1010 Ion Mill.

 

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